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ISO 14644-1 Cleanroom Classes and the Filters Behind Them
2026-09-27
What ISO 5, 6, 7 and 8 mean in particles per cubic metre, and how the filtration train — prefilter, medium-efficiency filter and HEPA — is built for each class.
Key points
- ISO classes are defined by the maximum number of particles per m³ — ISO 5 allows 3,520 particles ≥ 0.5 µm, ISO 7 allows 352,000.
- Each step of one class means ten times more or fewer particles.
- Clean air comes from a filter train: coarse prefilter → medium-efficiency filter → terminal HEPA.
- Pressure cascades, pass boxes and good practice keep the room clean after the filters.
Particle limits by class
ISO 14644-1 maximum concentration, particles per m³| Class | ≥ 0.5 µm | ≥ 1 µm | ≥ 5 µm | Former US FED-STD-209E |
|---|
| ISO 5 | 3,520 | 832 | — | Class 100 |
| ISO 6 | 35,200 | 8,320 | 293 | Class 1,000 |
| ISO 7 | 352,000 | 83,200 | 2,930 | Class 10,000 |
| ISO 8 | 3,520,000 | 832,000 | 29,300 | Class 100,000 |
Classes are determined by particle counts at the chosen occupancy state (as-built, at-rest or operational).
The filter train
No single filter produces a cleanroom. Air passes through stages, each protecting the next:
- Coarse prefilters (panel, pleated or mesh) remove large dust and fibres at the intake.
- Medium-efficiency filters (pocket, P-Cell, V-Cell, W-Cell — typically ISO ePM1 grades) remove fine dust and protect the HEPA stage.
- Terminal HEPA or ULPA filters (ceiling modules or FFUs) deliver the final clean air into the room.
Typical configuration by class
| Class | Terminal filters | Typical arrangement |
|---|
| ISO 8 | HEPA (often H13) | Ducted terminal modules, partial ceiling coverage |
| ISO 7 | HEPA (H13/H14) | Terminal modules or FFUs, higher air changes |
| ISO 6 | HEPA (H14) | FFUs or terminal modules, larger coverage |
| ISO 5 | HEPA H14 or ULPA | Unidirectional flow, FFU ceiling or clean bench / booth |
A local ISO 5 zone is often created with a clean workstation or clean booth inside an ISO 7 room instead of making the whole room ISO 5.
Keeping the room clean
- Keep a pressure cascade from cleaner to less clean areas; relief dampers stabilise it.
- Transfer materials through interlocked pass boxes instead of opening doors.
- Scan-test terminal HEPA filters after installation — every terminal filter in ISO 5 and cleaner rooms.
- In unidirectional flow, keep the rated resistance of filters on the same supply face close together (within about 5% of the average) so airflow stays uniform.
Frequently asked questions
Is ISO 7 the same as Class 10,000?+
Approximately. FED-STD-209E was withdrawn in 2001; ISO 7 is the equivalent ISO 14644-1 class for particles ≥ 0.5 µm.
Can I make only part of a room ISO 5?+
Yes. Clean workstations, clean booths or a local FFU canopy create ISO 5 zones inside a less clean room.
Which HEPA class do I need for ISO 7?+
H13 is common; H14 is used where the design or customer requires it. See our guide to H13 vs H14.