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ISO 14644-1 Cleanroom Classes and the Filters Behind Them

2026-09-27

What ISO 5, 6, 7 and 8 mean in particles per cubic metre, and how the filtration train — prefilter, medium-efficiency filter and HEPA — is built for each class.

Key points

  • ISO classes are defined by the maximum number of particles per m³ — ISO 5 allows 3,520 particles ≥ 0.5 µm, ISO 7 allows 352,000.
  • Each step of one class means ten times more or fewer particles.
  • Clean air comes from a filter train: coarse prefilter → medium-efficiency filter → terminal HEPA.
  • Pressure cascades, pass boxes and good practice keep the room clean after the filters.

Particle limits by class

ISO 14644-1 maximum concentration, particles per m³
Class≥ 0.5 µm≥ 1 µm≥ 5 µmFormer US FED-STD-209E
ISO 53,520832—Class 100
ISO 635,2008,320293Class 1,000
ISO 7352,00083,2002,930Class 10,000
ISO 83,520,000832,00029,300Class 100,000

Classes are determined by particle counts at the chosen occupancy state (as-built, at-rest or operational).

The filter train

No single filter produces a cleanroom. Air passes through stages, each protecting the next:

  • Coarse prefilters (panel, pleated or mesh) remove large dust and fibres at the intake.
  • Medium-efficiency filters (pocket, P-Cell, V-Cell, W-Cell — typically ISO ePM1 grades) remove fine dust and protect the HEPA stage.
  • Terminal HEPA or ULPA filters (ceiling modules or FFUs) deliver the final clean air into the room.

Typical configuration by class

ClassTerminal filtersTypical arrangement
ISO 8HEPA (often H13)Ducted terminal modules, partial ceiling coverage
ISO 7HEPA (H13/H14)Terminal modules or FFUs, higher air changes
ISO 6HEPA (H14)FFUs or terminal modules, larger coverage
ISO 5HEPA H14 or ULPAUnidirectional flow, FFU ceiling or clean bench / booth

A local ISO 5 zone is often created with a clean workstation or clean booth inside an ISO 7 room instead of making the whole room ISO 5.

Keeping the room clean

  • Keep a pressure cascade from cleaner to less clean areas; relief dampers stabilise it.
  • Transfer materials through interlocked pass boxes instead of opening doors.
  • Scan-test terminal HEPA filters after installation — every terminal filter in ISO 5 and cleaner rooms.
  • In unidirectional flow, keep the rated resistance of filters on the same supply face close together (within about 5% of the average) so airflow stays uniform.

Frequently asked questions

Is ISO 7 the same as Class 10,000?

Approximately. FED-STD-209E was withdrawn in 2001; ISO 7 is the equivalent ISO 14644-1 class for particles ≥ 0.5 µm.

Can I make only part of a room ISO 5?

Yes. Clean workstations, clean booths or a local FFU canopy create ISO 5 zones inside a less clean room.

Which HEPA class do I need for ISO 7?

H13 is common; H14 is used where the design or customer requires it. See our guide to H13 vs H14.

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